The Laser Focused Ion Beam platform will be a next generation development beyond today’s systems.
This platform will be developed to include laser processing capabilities that will dramatically improve the production rates of micro and nano sized components. It will have an extended range of 100mm x 100mm offering world-leading production capabilities, with in-process metrology an essential element of this system. Secondary-ion/electronic stereoscopic imaging and optical interferometric techniques will be explored to provide, for the first time, closed loop metrology operations for additive and subtractive processing steps at nanometre levels.
The Laser Focused Ion Beam (Laser FIB) platform will be developed in close collaboration with ion-beam partners, metrology suppliers, and with the micro and nanotechnology team of the National Physical Laboratory through Professor Richard Leach.
