Focus Ion Beam/Scanning Electron Microscope

Image courtesy of the IfM

Information Detail
Type Focussed Ion Beam / Scanning Electron microscope with accessories
Manufacturer Zeiss
Model/Specification Number 1540 XB
Year Manufactured 2008
Availability This FIB/SEM can be accessed for commercial and research purposes
Contact Name n/a
Contact email CIP-admin@eng.cam.ac.uk
Description

Scanning Electron Microscope down to 1.1nm
Ga Focused Ion Beam to 5nm.
Accessories: Gas injector, BSD, STEM, EDX, micro gripper and manipulator with force measurement nano indenter and lithography software.

Address:
Centre for Industrial Photonics, Institute for Manufacturing, Department of Engineering, University of Cambridge, Alan Reece Building, 17 Charles Babbage Road, Cambridge, CB3 0FS
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