Special Interest Group: Micro/Nano Manufacturing Workshop

The emergence of products based on micro and nano technology has increased during the last two decades. The first commercially available products of these types were based on the VLSI technology and are usually referred to as micro electro-mechanical systems (MEMS) or nano electro-mechanical systems (NEMS). An increase in the push of products based on other materials such as metals, polymers and ceramics is significant, so many efforts are focused towards this area, usually referred to as micro/nano manufacturing. Micro/nano manufacturing is recognized as a key element in bridging the gap between the nano and macro worlds. Relevant industrial sectors include automotive, medical, sensors and actuators etc.

The scale of both the challenge and the opportunity provided in this area, led us to bring together an internationally coordinated meeting to address this seminal topic.

This workshop is supported by the EMRP Joint Research Project “Multi-sensor metrology for microparts in innovative industrial products”. The workshop will host a keynote and several presentations and posters covering the newest developments and research on this increasingly important topic. The workshop will also host several training seminars covering aspects of multi-sensor metrology in practice.

Presentations from this meeting will be available to all attendees of the meeting and euspen members after the event.

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